JPH052924B2 - - Google Patents

Info

Publication number
JPH052924B2
JPH052924B2 JP18493283A JP18493283A JPH052924B2 JP H052924 B2 JPH052924 B2 JP H052924B2 JP 18493283 A JP18493283 A JP 18493283A JP 18493283 A JP18493283 A JP 18493283A JP H052924 B2 JPH052924 B2 JP H052924B2
Authority
JP
Japan
Prior art keywords
phase
deformation
measured
laser beam
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP18493283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6076604A (ja
Inventor
Suezo Nakatate
Katsuhisa Tsutsumi
Toyohiko Yatagai
Hiroyoshi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP18493283A priority Critical patent/JPS6076604A/ja
Publication of JPS6076604A publication Critical patent/JPS6076604A/ja
Publication of JPH052924B2 publication Critical patent/JPH052924B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G01B11/162—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
    • G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP18493283A 1983-10-03 1983-10-03 位相変調スペックル干渉計による粗面物体の変形測定法および測定装置 Granted JPS6076604A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18493283A JPS6076604A (ja) 1983-10-03 1983-10-03 位相変調スペックル干渉計による粗面物体の変形測定法および測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18493283A JPS6076604A (ja) 1983-10-03 1983-10-03 位相変調スペックル干渉計による粗面物体の変形測定法および測定装置

Publications (2)

Publication Number Publication Date
JPS6076604A JPS6076604A (ja) 1985-05-01
JPH052924B2 true JPH052924B2 (en]) 1993-01-13

Family

ID=16161864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18493283A Granted JPS6076604A (ja) 1983-10-03 1983-10-03 位相変調スペックル干渉計による粗面物体の変形測定法および測定装置

Country Status (1)

Country Link
JP (1) JPS6076604A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8820761D0 (en) * 1988-09-02 1988-10-05 Tyrer J R Interferometry
DK0915317T3 (da) * 1997-11-04 2003-09-15 Europ Economic Community Fremgangsmåde til forbedring af kontrasten fra billeder opnået under anvendelse af den pulserede billedadditionsteknik ESPI
JP4843789B2 (ja) * 2006-08-11 2011-12-21 国立大学法人富山大学 レーザスペックルによるナノメートル変位測定方法と装置

Also Published As

Publication number Publication date
JPS6076604A (ja) 1985-05-01

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